The MV-2000 achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.
MI-1242-PV, 96, TEOS, 1.5g/min, 5SLM, 200Torr, EN, (Type：000120)
Liquid flow rate：1.5g/min
Carrier gas：N2 or He
Carrier gas flow rate：5SLM
Inlet pressure：0.2～0.3Mpa(G)
Downstream pressure：Less than 200torr
Operation temp：120°C
MI-1241-PV, 96, TEB, 0.5g/min, 5SLM, 200Torr, EN, (Type：000120)
Liquid flow rate：0.5g/min
Carrier gas：N2 or He
Carrier gas flow rate：5SLM
Inlet pressure：0.2～0.3Mpa(G)
Downstream pressure：Less than 200torr
Operation temp：60°C
MI-1241-PV, 96, TEPO, 0.1g/min, 5SLM, 200Torr, EN, (Type：000120)
Liquid flow rate：0.1g/min
Carrier gas：N2 or He
Carrier gas flow rate：5SLM
Inlet pressure：0.2～0.3Mpa(G)
Downstream pressure：Less than 200torr
Operation temp：90°C
The LF-F and LV-F Series are digital liquid mass flow controllers using a Peltier element which cools the liquid rather than using the more common method of thermal heating. This technique removes the risk of boiling chemicals with a low boiling point, thus allowing for greater chemical control.
LF-F40M-A-EVD1 TEOS 3g/min
LF-F40M-A-EVD1 TEOS 1.5g/min
LF-F20M-A-EVD1 TEPO 0.1g/min
Needed when adding LF-F/LV-F Series to older systems that use the 8-pin analog connectors.
SC-EDH-1M - 1 Meter Cable adapter for Analog to Digital
SC-EDH-2M - 2 Meter Cable adapter for Analog to Digital
SC-EDH-3M - 3 Meter Cable adapter for Analog to Digital
These MFC's have multi-range/multi-gas functions allowing users to change the gas type or full-scale flow on-site. High accuracy for all ranges (+/- 1.0% S.P.) with piezo actuator valve. High speed response: 1 second response time between any two setpoints, and all-metal design.
(BIN R1) MFC Z500 Programmable 1/4 VCR MTL N/C VIU 9P-DSUB
(BIN 01) MFC Z500 Programmable 1/4 VCR MTL N/C VIU 9P-DSUB
(BIN 02) MFC Z500 Programmable 1/4 VCR MTL N/C VIU 9P-DSUB
(BIN 03) MFC Z500 Programmable 1/4 VCR MTL N/C VIU 9P-DSUB
(BIN 04) MFC Z500 Programmable 1/4 VCR MTL N/C VIU 9P-DSUB
(BIN 05) MFC Z500 Programmable 1/4 VCR MTL N/C VIU 9P-DSUB
(BIN 06) MFC Z500 Programmable 1/4 VCR MTL N/C VIU 9P-DSUB
(BIN 07) MFC Z500 Programmable 1/4 VCR MTL N/C VIU 9P-DSUB
(BIN 07)MFC Z500 Programmable 1/4 VCR MTL N/O VIU 9P-DSUB
(BIN 09) MFC Z500 Programmable 1/2 VCR MTL N/O VIU 9P-DSUB
