Featured Systems
Centura® HTF
Atmospheric EPI
The Centura® EPI is a single-wafer, multi-chamber system that supports processing of wafers ranging in size from 5", 6", or 8". The multi-chamber design allows for individual processes in each of the chambers. The HTF platform may include up to 3 EPI process chambers and 2 auxiliary chambers, depending on configuration. The Loadlocks and buffer chamber are ENP (electroless nickel plated) to reduce corrosion. The mainframe doors are provided for safety and oise reduction. The upper frame houses a blower and heat exchangers. The following chamber types can be added to the system: ATM EPI - Atmospheric Pressure EPI provides thiker EPI layers where autodoping is not as much of an issues. TCS is used as the silicon source. Single slot non-contact cooldown, or sincle slot contact cooldown.- Widebody or Narrowbody Loadlocks
- HP or HP+ Robot
- Configurable Gas Panel - Transducers and/or Pump/Purge (Optional)
- 1 to 3 Atmospheric Pressure Chambers
- Rotation Version R3.4 with Anti-Wobble Upgrade
- Variable Speed Blowers (VSB)
- Dome Temperature Monitoring (Aux Pyro)
- Completely NEW Gas Panel
- 480 Volt 600 Amp
- Can be configured for 125mm (5"), 150mm (6"), or 200mm (8")
Warranty: 90 Days (Standard) Extended Warranty Available
Centura® HTF
Reduced Pressure EPI
The Centura® EPI is a single-wafer, multi-chamber system that supports processing of wafers ranging in size from 5", 6", or 8". The multi-chamber design allows for individual processes in each of the chambers. The HTF platform may include up to 3 EPI process chambers and 2 auxiliary chambers, depending on configuration. The Loadlocks and buffer chamber are ENP (electroless nickel plated) to reduce corrosion. The mainframe doors are provided for safety and oise reduction. The upper frame houses a blower and heat exchangers. The following chamber types can be added to the system: RP EPI - Reduced Pressure EPI provides improved performance for autodoping, and less pattern distortion. DCS is used as the silicon source. Single slot non-contact cooldown, or sincle slot contact cooldown.- Widebody or Narrowbody Loadlocks
- HP or HP+ Robot
- Configurable Gas Panel - Transducers and/or Pump/Purge (Optional)
- 1 to 3 Reduced Pressure Chambers
- Rotation Version R3.4 with Anti-Wobble Upgrade
- Variable Speed Blowers (VSB)
- Dome Temperature Monitoring (Aux Pyro)
- Completely NEW Gas Panel
- 480 Volt 600 Amp
- Can be configured for 125mm (5"), 150mm (6"), or 200mm (8")
Warranty: 90 Days (Standard) Extended Warranty Available
Centura® TPCC
DPN
The Centura® TPCC is a single-wafer, multi-chamber system that supports processing of wafers ranging in size from 5", 6", or 8". The multi-chamber design allows for individual processes in each of the chambers. The Centura® TPCC platform may include up to 4 process chambers and 2 auxiliary chambers, depending on configuration. Platform supports RTP, SiNgen, POLYgen, OxZgen, DCSxZ, TanOx, and DPN. The system is currently configured with 3 DPN chambers.- Widebody or Narrowbody Loadlocks
- HP or HP+ Robot
- On-The-Fly Centerfinding
- Seiko Seiki STP-A1603C Turbo Pumps
- RFPP RF20R Generators
- Throttling Gate Valves
- Standard Gas Panel
- Can be configured for 125mm (5"), 150mm (6"), or 200mm (8")
Warranty: 90 Days (Standard) Extended Warranty Available
Centura® CVD
DxZ, WxZ, HDP-CVD, Giga-Fill, Etc.
The Centura® CVD is a single-wafer, multi-chamber system that supports processing of wafers ranging in size from 5", 6", or 8". The multi-chamber design allows for individual processes in each of the chambers. The Centura platform may include up to 4 process chambers and 2 auxiliary chambers, depending on configuration.- Widebody or Narrowbody Loadlocks
- HP or HP+ Robot
- Chambers Customized to order
- On-The-Fly Centerfinding Available
- Top Mount RPS Available
- Standard or Seriplex Gas Panel
- Can be configured for 125mm (5"), 150mm (6"), or 200mm (8")
Warranty: 90 Days (Standard) Extended Warranty Available
Equipment Inventory
| Model | Description | Size | Serial # | Quote |
|---|---|---|---|---|
| Centura 5200 | 2 Chamber DxZ, NBLL, PE and SACVD, top mount RPS, As Is, Excellent Condition, Refurbishment Optional | 200mm | SN 2851 | RFQ |
| Centura HTF | 3 Chamber EPI, ATM or RP, Refurbished to meet OEM Tier I & II specifications, 150mm or 200mm, warranty. | TBD | SN 2128 | RFQ |
| Centura HTF | 3 Chamber EPI, ATM or RP, Refurbished to meet OEM Tier I & II specifications, 150mm or 200mm, warranty. | TBD | SN 2302 | RFQ |
| Centura 5200 | 3 Chamber DxZ System | 200mm | SN C337 | RFQ |
| Centura 5200 | MCVD System | 200mm | SN CB14 | RFQ |
| Centura 5200 | EPI Core System, configured as required | 200mm | SN 3143 | RFQ |
| P5000 | 4 Chamber Delta SACVD, As Is, Excellent Condition, refurbishment optional | 200mm | SN 4990 | RFQ |
| P5000 | 3 Chamber Etch, CVD, DxZ | 150mm | SN 6913 | RFQ |
| P5000 | 3 Chamber Metal Etch, 2 x R2 Etch, 1 x ASP, As Is, Good Condition, Refurbishment Optional | 150mm | SN 6740 | RFQ |
| P5000 | 3 Chamber Metal Etch, 2 x R2 Etch, 1 x ASP, As Is, Good Condition, Refurbishment Optional | 150mm | SN 6362 | RFQ |
| P5000 | 3 Chamber MCVD | 0mm | SN 3069 | RFQ |
| P5000 | 3 Chamber CVD - Version 3 Hot Box | 200mm | SN 6268 | RFQ |
| P5000 | 2 Chamber MCVD | 150mm | SN 6526 | RFQ |
| P5000 | CVD System | 100mm | SN A025 | RFQ |
| P5000 | Precision 5000 | 0mm | SN A157 | RFQ |
| P5000 | Precision 5000 | 0mm | SN A181 | RFQ |
| P5000 | Precision 5000 | 0mm | SN CA5795 | RFQ |
| P5000 | 3 Chamber MxP Etch System | 150mm | SN 7154 | RFQ |
| Model | Description | Size | Serial # | Quote |
|---|---|---|---|---|
| LAM Rainbow 4400 | Poly etch system, complete in excellent condition | 150mm | SN 2364 | RFQ |
| LAM Rainbow 4420 | Poly etch system, complete in excellent condition | 150mm | SN 3054 | RFQ |
| LAM Rainbow 4420 | Poly etch system, complete in excellent condition | 150mm | SN 3583 | RFQ |
| LAM Rainbow 4520 | Oxide etch system, complete in excellent condition | 150mm | SN 3438 | RFQ |
| LAM Rainbow 4420B | Poly etch system, complete in excellent condition | 150mm | SN 3322 | RFQ |
| LAM TCP 9600SE | Metal Etch System, complete in excellent condition | 150mm | SN 4193 | RFQ |
| LAM TCP 9600SE | Metal Etch System, complete in excellent condition | 150mm | SN 4247 | RFQ |
| Novellus Concept 1 | CVD System | 0mm | SN 0000 | RFQ |
| Model | Description | Size | Serial # | Quote |
|---|---|---|---|---|
| MRC Eclipse | Physical Vapor Deposition (PVD) System | 0mm | SN 15456 | RFQ |
| Westech IPEC 372M | Fully Automated Wafer Polisher | 150mm | SN 202 | RFQ |
| Gasonics Aura 1000 | Automated single-wafer photoresist asher | 0mm | SN A463 | RFQ |
| Axcelis Fusion M150PC | UV Photoresist Stabilizer | 150mm | SN 0098 | RFQ |
| Axcelis Fusion M150PC | UV Photoresist Stabilizer | 150mm | SN 611 | RFQ |
| Axcelis Fusion M150PC | UV Photoresist Stabilizer | 150mm | SN 531 | RFQ |