SOCKET, BALL JOINT, CHAMBER VACUUM TEST
TUBE, BALL JOINT, ROT VACUUM TEST
TOOL, QUARTZ DOME PUSH 3/8-16 x 2"
FTG T/C PORT 9/16-18UNF X 1/8 TUBE
PROTECTIVE COVER, PROCESS CHAMBER
ROBOT CALIBRATION CABLE
INSERT, BLADE CENTERING TOOL, 200MM
RING PREHEAT, PROFILING, ALPHA COATING
SUSCEPTOR,TEMP CAL.,R3,200MM
TOOL, ROTATION SHAFTS CENTERING, 300MM EPI
TOOL ZERO POSITION
GAUGE, EPI POLY NITRIDE, .340 DIM
GAUGE, POLY OVLP/NITRIDE, .760 DIM
GAUGE, EPI/POLY BCCD, .555 DIM
GAUGE, POLY/BCCD, .410 DIM
GAUGE, POLY/BCCD, .860 DIM
FIXTURE, ALIGNMENT, WAFER LIFT,.75" PAD, R3 ROTATION
ALIGN FIXTURE WAFER HANDLER
METER THERMOMETER DIGITAL 0-2328 DEG C
PROBE, THERMOCOUPLE, MOLY-SHEATH 1/8"D X 9"L TYPE-R PT/13%RH-PT
FTG TBG 1/8T BACK FERRULE TEFLON
FTG TBG 1/8T FRONT FERRULE TEFLON
TOOL, TORQUE WRENCH 3/8"SQ-DR 20-100 FT-LB RANGE, 0.5 FT-LB INCREMENT
TOOL, BIT SKT & SET 3/8"SQ-DR 3/8"HEX 2-23/32"LG