System Refurbishment

Here is a basic overview of our refurbishment process...

System is stripped to the bare frame, and cleaned. Frame is sent out for sandblast and powdercoat if needed.
All sub-assemblies are disassembled and cleaned.
Stainless parts are cleaned and sent out for electropolish and passivation.
Nickel parts are cleaned and sent out for strip/re-nickel if needed.
MFCs are sent out for cleaning and calibration/resizing.
When frame returns from powdercoat, all new water lines and pneumatic lines are installed.
Subassemblies are rebuilt with new o-rings and seals.
Chamber trays and Wiring harnesses are installed.
Buffer chamber is installed and loadlocks are mounted.
Orienter, cooldown, and process chambers are installed.
Gas panel and gas lines are cleaned and reassembled. Parts are replaced as needed.
Entire system is helium leak checked including gas panel.
Once assembly is complete, system is final tested to Tier I level.